TAN, K.; MUHAMAD, M. The bonding modes and optical characteristics of annealed silicon oxide thin films prepared by plasma enhanced CVD. Malaysian Journal of Science, [S. l.], v. 16, n. 2, p. 13–16, 2017. Disponível em: https://jpmm.um.edu.my/index.php/MJS/article/view/4787. Acesso em: 1 jul. 2024.